Hot and Cold Chucks

Thermal chuck systems are essential for probing, characterization, inspection and failure analysis of semiconductor wafers and chips, and other material research applications.

The standard sizes of Instec hot and cold chucks range from 20mm to 300mm (custom sizes are available up to 600mm). Temperature ranges for standard models are available from -190șC to 600șC, with higher temperature limits available for custom hot chucks.

Instec thermal chucks provide ultra temperature uniformity and stability (better than ±0.1șC). An optional triaxial heater is available for eliminating electrical noise. The chuck surface is available as a grounded or floating surface. Instec chucks are available in two shapes: round chucks and square chucks to meet different application needs.

Instec's basic thermal chuck systems consist of a thermal wafer vacuum chuck, a STC200 Series standalone temperature controller, and WinTemp - a Windows based software.
 
Hot and Cold Chucks - Round
Model
Temperature Range
Sample Area
HCC206R
-40°C to 200°C
150 mm diameter
(6 in)
HCC306R
-40°C to 310°C
150 mm diameter
(6 in)
HCC208R
-30°C to 200°C
200 mm diameter
(8 in)
HCC308R
-30°C to 310°C
200 mm diameter
(8 in)
HCC20CR
-20°C to 200°C
300 mm diameter
(12 in)
HCC30CR
-20°C to 310°C
300 mm diameter
(12 in)
Hot and Cold Chucks - Square
Model
Temperature Range
Sample Area
HCC214S
-40°C to 200°C
100 x 100 mm
(4 x 4 in)
HCC314S
-40°C to 310°C
100 x 100 mm
(4 x 4 in)
HCC216S
-40°C to 200°C
150 x 150 mm
(6 x 6 in)
HCC316S
-40°C to 310°C
150 x 150 mm
(6 x 6 in)
HCC208S
-30°C to 200°C
200 x 200 mm
(8 x 8 in)
HCC308S
-30°C to 310°C
200 x 200 mm
(8 x 8 in)
TC64
-20°C to 90°C
Thermoelectric Chuck
100 x 100 mm
(4 x 4 in)

 
- Information for STC200 Series Temperature Controller.

- Information for optional Cooling Accessories.

Contact Instec today for complete product brochures. Inquiries for a hot and cold chuck system customized to your special requirements are also welcome.